In the low-pressure plasma technology, gas is excited in a vacuum by supplying electrical energy. This results in energetic ions and electrons, as well as other reactive particles, which constitute the plasma. Surfaces can then be effectively altered.
There are three plasma effects:
- physical removal of material by ion bombardment;
- chemical reaction of the ionized gas with the surface;
- UV radiation breaks down long-chain carbon compounds.
The effect of the plasma changes by varying the process parameters such as pressure, power, process time, gas flow and composition.
13.56 MHz / 50 W fixed matching
volume: 10.5 litres (diameter 211 mm, length 300 mm)
scroll pump (Edwards nXDS)
2 gas channels via needle valves
process gases: air, oxygen, argon, nitrogen
manual, process time via analogue timer
Plasma is used in areas where it matters to change the surface properties of materials. It is possible to modify virtually any surface with this technology. The main applications of plasma treatment are: