Low pressure plasma system

Product of dienst

Low pressure plasma system

In the low-pressure plasma technology, gas is excited in a vacuum by supplying electrical energy. This results in energetic ions and electrons, as well as other reactive particles, which constitute the plasma. Surfaces can then be effectively altered.

There are three plasma effects:

  • physical removal of material by ion bombardment;
  • chemical reaction of the ionized gas with the surface;
  • UV radiation breaks down long-chain carbon compounds.

The effect of the plasma changes by varying the process parameters such as pressure, power, process time, gas flow and composition.

Technical details

Generator
13.56 MHz / 50 W fixed matching

Chamber
material: glass
volume: 10.5 litres (diameter 211 mm, length 300 mm)

Vacuum pump
scroll pump (Edwards nXDS)

Gas supply
2 gas channels via needle valves
process gases: air, oxygen, argon, nitrogen

Control
manual, process time via analogue timer

Applications

Plasma is used in areas where it matters to change the surface properties of materials. It is possible to modify virtually any surface with this technology. The main applications of plasma treatment are: